Enlarging metal grain size over electron mean free path is one of the ways to reduce resistivity in BEOL interconnect because it suppresses electron scattering at grain boundaries. In this work, by ...

Laser-induced backside wet etching of silica glass and sapphire plates was performed by the excitation of a liquid with a ns-pulsed UV excimer laser. Well-defined micropatterns were fabricated without ...

Femtosecond laser ionization time-of-flight mass spectrometry (fs-LI-TOFMS) is introduced for the three-dimensional elemental analysis of a Nantan meteorite. Spatially resolved multielemental imaging ...